Performance requirements of coating targets for hard coating

The performance requirements of the coating target for hard coating are mainly the requirements for the thermal conductivity, electrical conductivity and thermal expansion coefficient of the sputtering target. The temperature of the target increases due to sputtering, the higher the thermal conductivity, the faster the heat transfer, the better the evaporation effect of the target ions, and the higher the deposition efficiency; the smaller the difference between the thermal expansion coefficient of the target and the substrate, the more Well, to reduce the effects of thermal stress.

To sum up, the technical requirements for coating Zirconium Sputtering Target for hard coatings include target purity, density, composition and structural uniformity, etc.; the performance requirements are mainly for the thermal conductivity, electrical conductivity and thermal expansion coefficient of sputtering targets. Require.