What are the performance requirements of sputtering targets?

I believe everyone is familiar with sputtering targets. It is mainly used in chips, microelectronics, display screens and other industries. Especially with the development of the electronic information industry, the demand for sputtering targets has gradually increased. The material is also known by more people, so what are the requirements for the performance of the sputtering target during use? The following editor will introduce to you the performance requirements of sputtering targets.

Performance requirements for sputtering targets

1. Purity

Purity is the main performance index of the Ti-Al Sputtering Target. The purity of the sputtering target has a great influence on the performance of the thin film. However, in the actual application process, different products have different requirements for the purity of the target. For example, in the microelectronics industry, with the development of the industry, the size of silicon wafers has been developed, and the width of wiring has been reduced from 0.5um to 0.25um, 0.18um or even 0.13um. The purity of the previous target can be satisfied. The process requirements of 0.35um IC, but the purity of the target material before the preparation of 0.18um lines is not competent, and the purity needs to be higher.

2. Impurity content

Impurities in sputtering targets and oxygen and moisture in pores are the main sources of pollution for target deposition films. Targets with different uses have different requirements for impurity content. Pure aluminum and aluminum alloy targets used in the semiconductor industry have certain special requirements for alkali metal content and radioactive elements.

3. Density

In order to reduce the number of pores in the sputtering target and improve the performance of the sputtering film, the density of the sputtering target also has certain requirements. Because the density of the sputtering target affects the amount of sputtering of the target, it also affects the electrical and optical properties of the film. The higher the density of the target, the better the performance of the film. Not only that, improving the density and strength of the target can also help the target to better withstand the thermal stress during the sputtering process, so the density is also one of the important performance indicators of the sputtering target.

4. Crystal Orientation

 The sputtering target is suitable for sputtering. The atoms of the target are easily sputtered along the relatively close arrangement of the atoms in the hexagonal direction. Therefore, in order to improve the sputtering speed of the target, it is necessary to increase the sputtering by changing the crystal structure of the target. speed. Different materials have different crystal structures, so different forming methods, heat treatment methods and conditions are required to improve the sputtering efficiency of the target and ensure the quality of the deposited films.

Application function of titanium plate and titanium alloy plate in petrochemical industry

Titanium alloy plates and titanium plates are mainly used to manufacture various containers, reactors, heat exchangers, distillation columns, pipes, pumps and valves in the petrochemical machinery manufacturing industry. Titanium can be used as titanium cathodes and condensers in power stations and as environmental pollution control devices. The hardness of steel is higher than that of Grade 7 Titanium Sheet, but the specific strength or tensile strength of titanium alloy is higher than that of high-quality steel. Titanium alloys have good heat resistance, low-temperature toughness and fracture toughness, so they are mostly used as aircraft engine parts and rocket and missile structural parts. Titanium alloys can also be used as fuel and oxidant storage tanks and high-pressure containers. Automatic rifles, mortar mounts and launch tubes for recoilless guns are now made of titanium alloys.

1. Memory function

Titanium-nickel alloys have unidirectional, bidirectional and omnidirectional memory effects at a certain ambient temperature, and are recognized as the best memory titanium alloys. In engineering, pipe joints are used in the oil pressure system of fighter jets; oil pipeline systems in oil complexes; 500mm diameter parabolic mesh antenna made of 0.5mm diameter wire is used in aerospace vehicles; in medical engineering, it is used to make snoring Treatment; titanium plates made of screws for fracture healing, etc. The above-mentioned applications have obtained obvious effects.

2. Superconducting function

The niobium-titanium plate exhibits a zero-resistance superconducting function when the temperature is lower than the critical temperature.

3. Hydrogen storage function

Titanium-iron alloy has the characteristics of hydrogen absorption, which can store a large amount of hydrogen safely and release hydrogen in a certain environment. This has promising applications in hydrogen separation, hydrogen purification, hydrogen storage and transportation, and the manufacture of hydrogen-based heat pumps and batteries.

Titanium dioxide, the oxide of Gr5 Ti-6Al-4V Titanium Plate, is a snow-white powder and a good white pigment, commonly known as titanium dioxide. In the past, the main purpose of mining titanium ore was to obtain titanium dioxide. Titanium dioxide has strong adhesion, is not easy to chemically change, and is always white. Especially valuable is that titanium dioxide is non-toxic. It has a high melting point and is used to make refractory glass, glaze, enamel, clay, and high-temperature laboratory utensils.

Application of titanium-nickel memory alloy material in medical field

1. A new type of beta titanium alloy. In the 1990s, the United States and Japan developed a series of new beta-titanium alloys with non-toxic elements such as molybdenum, niobium, tantalum, and zirconium instead of toxic elements such as vanadium and aluminum. This type of alloy has two characteristics: one is that it contains high β-stabilizing elements; the other is that it has a lower elastic modulus (E=55~85GPa), which is closer to the elastic modulus of dense human bone (E=28GPa). The alloy series developed in the United States are: Ti-13Nb-13Zr, Ti-12Mo-6Zr-2Fe, Ti-15Mo-2.8Nb-0.2Si, Ti-15Nb, Ti-16Nb-10Hf, Ti-15Mo-3Nb. Developed in Japan are: Ti-35Nb-5Ta-7Zr and Ti-29Nb-13Ta (respectively plus 4.6Zr or 4Mo or 2Sn or 4.6Sn or 6Sn) and other alloy series.

2. Titanium-nickel alloy. Ti-Ni shape memory alloy is a new type of functional material with peculiar shape memory properties and phase transformation pseudoelasticity. Ti-Ni shape memory alloys are usually divided into three categories: one-way memory effect alloys; two-way memory effect alloys; Elastic alloy. Seamless Titanium Tube Grade 2 Because of its excellent biocompatibility, corrosion and wear resistance, high fatigue resistance, and elastic modulus similar to human bones, it is widely used in the medical field, and can be used in oral, neurosurgery, cardiovascular, thoracic surgery, ear and nose surgery. Laryngology, hepatobiliary, urology and gynecology, etc. Products include orthodontic wire, root canal file, spinal orthopedic rod, bone plate, intramedullary needle, patella claw, guide wire, guide needle, cardiac patch, vascular stent, thrombus Filters, esophagus stents, respiratory stents, biliary stents, urethral stents, rectal stents, duodenal stents, external auditory canal stents, birth control rings, etc.

Titanium plate and titanium alloy plate heat treatment in the process of crystallization

In addition to the recovery and recrystallization process of the cold-worked structure, the high-quality titanium alloy plate and the titanium plate also have the solution of the compound and the polymorphic transformation of a→β. In order to improve the properties of titanium alloys and Grade 7 Titanium Sheet, in addition to necessary alloying, appropriate heat treatment is generally used. The recovery process of titanium alloys and titanium plates is also a process of eliminating most of the second type of internal stress generated during deformation through the movement of vacancies and dislocations at a certain temperature. The temperature at which the recovery process occurs is lower than the recrystallization temperature, generally 500 to 650°C.

Like other metals, the recrystallization process of high-quality titanium alloy plates and titanium plates is also in the nucleation and growth process of crystal grains in the deformed structure. At this time, the lattice type does not change, but there is a change in mechanical properties. This process is affected by the degree of cold deformation, heating temperature and holding time, and can be recrystallized by three-dimensional recrystallization of cold deformation rate, heating temperature and recrystallized grain size.

The effect of alloying elements on the recrystallization temperature of pure titanium has been described in the previous section. In addition to niobium and cobalt, commonly used alloying elements and impurity elements can increase the recrystallization temperature of titanium.

Determination of recrystallization mainly adopts a combination of metallographic observation and X-ray diffraction. When recrystallization occurs, fine equiaxed grains appear on the deformed fibrous structure, and the diffraction rings on the X-ray back-reflection Laue diagram phase begin to become disconnected spots. For heat-treatable β alloys, incomplete aging (500°C/4-8 hours, air cooling) can also be used to display the recrystallized structure, and the unrecrystallized grains after incomplete aging appear dark after corrosion. It has been determined that the initial recrystallization temperature of TA2 pure titanium is about 550 °C, TA7 titanium alloy is about 600 °C, TC4 titanium alloy is about 700 °C, and TB2 alloy is about 750 °C.

It should be pointed out that in grade 7 titanium alloy plate and titanium sheets, the recrystallization process is often accompanied by some other structural changes. For example, in near-a alloys and a+β alloys with a small content of β-stabilizing elements, the dissolution of a phase and the change of β composition are accompanied by the recrystallization process in heat-treatable β alloys. Or have a gestational effect on subsequent aging. In addition, different types of alloys have different microstructures at room temperature, different alloy phases involved in deformation, and different recrystallization processes and characteristics. The recrystallization of the a-alloy is mainly carried out in the a-phase. In addition to industrial pure titanium, the cold deformation ability of a alloy is small, so the grain refinement effect is difficult, and the recrystallization in the β-type alloy is mainly carried out in the β phase. The cold deformation ability of β alloy is great, the degree of grain breakage is great, and the original structure can be changed by recrystallization. However, due to the large tendency of grain growth in β alloys, grain refinement is still difficult. As for the a+β alloy, it depends on the main phase involved in the deformation, and it is analyzed according to the specific situation. For example, the recrystallization of the TC4 alloy is mainly the recrystallization of the a phase.

Advantages and manufacturing methods of titanium welded pipes in the field of seawater desalination in power plants

Titanium alloy materials have high chemical activity and a very high affinity with oxygen and nitrogen in the air. Titanium begins to absorb oxygen above 600 °C and nitrogen above 700 °C to form corresponding compounds. The result of oxygen and nitrogen contamination of titanium is to increase the strength and hardness of titanium and reduce the plasticity, and nitrogen has a greater influence than oxygen.

1. What are the advantages and uses of Grade 2 Pure Titanium Pipe compared with seamless pipes?

Titanium welded pipe has the following advantages:

(1) Pipe fittings with thinner wall thicknesses can be manufactured. For example, the wall thickness of welded pipes can be 0.3~0.5mm, while the minimum wall thickness of seamless pipes is 1mm;

(2) High utilization rate of raw materials;

(3) High production efficiency and good economic benefits.

Titanium welded pipes are mainly used in condensers of power plants, various heat exchangers in seawater desalination equipment, bicycle frames, motorcycle mufflers, etc.

2. What is the manufacturing method of titanium welded pipe?

Titanium welded pipe is made of cold-rolled sheet coil (titanium coil), and the circumference of the outer diameter of the finished pipe is subtracted from the required width of the weld as the width of the strip. After such a strip is continuously rolled and formed, it is TIG Welding is the finished product. The outer diameter of the production pipe diameter is 10~50mm, and the wall thickness is 0.3~2mm. After welding, there is no need to hammer welding slag and grinding, the surface is very smooth, and secondary processing such as pipe expansion and pipe bending can also be performed, which is almost no different from titanium pipe.

Friction properties of titanium alloy materials for artificial joints

Titanium is corrosion-resistant, has high strength and good toughness, and has good enough biocompatibility compared to other metal materials, making it a better choice for artificial joint implants. However, the follow-up study found that the wear resistance of titanium alloys was relatively general, and a small number of patients were allergic to them. Some studies have compared the friction experiments of stainless steel and titanium alloy with alumina under seawater conditions and found that the friction performance of titanium alloy is better than that of stainless steel material in a complex environment, and the friction coefficient is much lower than that of stainless steel material. 316L stainless steel under this condition The friction coefficient is about 0.4-0.6, while the friction coefficient of titanium alloy material is 0.2-0.3. However, ASTM F67 Gr2 Titanium Plate materials have the same phenomenon of corrosion and friction synergy as stainless steel materials, and titanium alloy materials are more serious. In the experiment, the volume loss due to corrosion and friction is more than that of stainless steel materials, but it can be improved by surface treatment technology. The friction and wear properties of titanium alloys enhance wear resistance and reduce the friction coefficient.

A study on the Ni-P coating on the surface of Ultra-Thin Titanium Alloy Sheet found that the friction coefficient of the untreated titanium surface is around 0.6 and fluctuates greatly, and the friction coefficient after the Ni-P coating is basically stable at 0.45. In addition, the effect of depositing TiAlN coating on the surface of titanium alloy by magnetron sputtering is obvious. The wear amount of the TiAlN coating sample is only 20% of that of the titanium alloy substrate. Some domestic scholars have also found that the Al2O3/TiO2 composite nanocoating has better wear resistance. In addition, titanium alloys also have other disadvantages: because the surface hardness of titanium alloys is not high enough, the protection effect of surface oxides is poor, and the mechanical properties are poor, so the friction and wear performance are average. Fortunately, there is much research on titanium alloys. In recent years, new β-titanium alloys have come out. These titanium alloys have lower elastic modulus and better biocompatibility, and the general development trend is good. Titanium alloys have a large market as artificial joint materials, and the research progress is considerable. There is still room for improvement in friction and wear performance.

Empty titanium bar rolling

Heating characteristics and hot rolling characteristics of bars for die forging blades and fasteners. The batch materials used in the manufacture of aviation blades in the former Soviet Union are titanium alloy bars such as BT3-1, BT8, BT9, and OT4 with a diameter of 10-60mm. The material for aviation fasteners generally uses BT16 Titanium Industrial Rod with a diameter of 4.0-16mm.

The heating characteristics and hot rolling characteristics of BT3-1, BT8, BT9, and OT4 alloys determine the requirements for bar quality. For example, when the alloy is hot rolled at the temperature of the ot+p phase region, if its deformation is not less than 40%-50%, then the plasticity and fatigue strength indicators of this material are the highest. However, Grade 2 Pure Titanium Sheet at this temperature can significantly increase the deformation resistance of the billet pass and the intermediate pass, increase the unit pressure, and overload the motor of the rolling mill.

In this case, the rolling process should be carried out in two stages:

(1) Pre-emulsification at a temperature higher than a +p—P transition;

(2) Rolling to finished size at the temperature of the hot +P phase region of the alloy. In the final rolling stage, the rolled material should be cooled to a temperature below 650T.

Bars with a diameter greater than 8.0mm, and restocking of bars with a diameter of 4.0-8.0mm, should be rolled under one fire.